| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a uniform temperature distribution on a heating surface by forming a plane layers of a material with higher conductivity than that of a flat body in which a heater pattern is formed, between the heater and the heating surface. SOLUTION: Plane layers 4 of a material having higher heat conductivity than a flat body 1 are provided in the flat body 1 of ceramics. Heat propagated in the thickness direction of the flat body 1 from the pattern of a heater 2 is diffused at the plane layers 4 to have a uniform temperature, and is propagated to a heating surface 6 on an opposite surface to the surface on which the pattern of the heater 2 is formed. The temperature of the heating surface 6 can be uniformed even in a high temperature region. The plain layer 4 preferably has a thickness of 1-10μm. If it is too thin, the uniformed temperature does not have much effect, and if it is too thick, the plain layer 4 itself has a temperature distribution, and its surface temperature is not uniformized. Higher heat conductivity than that of the flat body 1 is only required for the plane layer 4 in a used temperature region of a heater 100, and a metal or a ceramic may be used.</p> |
