| 摘要 |
PROBLEM TO BE SOLVED: To prevent the defective spot existing on an object to be inspected from being missed by obtaining the positional relation of the spot as normalized coordinate data. SOLUTION: An inspection device detects the coordinate data Da of a defective spot A existing on a semiconductor wafer by means of a first coordinate detecting means 20 based on the angle of rotation and X- and Y-axis oscillating angles of a macro base 1 and, at the same time, the coordinate data Db of the defective spot A by means of a second coordinate detecting means 41 based on the moving amount of a pointer optical system unit 33 in the X-, Y-, and Z-axis directions when a spotlight emitted from the unit 33 is projected upon the defective spot A. Then the inspection device finds the normalized coordinate data Dc of the defective spot A when the wafer 2 is horizontally placed by means of a computer 40 based on the coordinate data Da and Db.
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