| 摘要 |
PROBLEM TO BE SOLVED: To provide a reliable active optical element whose structure is considerably simple, which can precisely form an interval of sub-micron, which can easily seal a micro optical element and which does not cause electrostatic adsorption by previously providing with a step a transfer die used when the micro optical element is formed by the transfer of resin in a space where the micro optical element moves. SOLUTION: A pole for connecting a lower electrode 201, a spring 203, an upper electrode 202 and a micro optical element are formed and the gap is filled with a sacrifice layer 301. The reflection mirror of a v-shape is formed of resin on the structure, the groove of the v-shape is filled with transparent resin 303 and a device is formed of a forming die 304 having a step 305. Thus, the step 305 is precisely formed while the upper face of filled transparent resin in the groove of the v-shape is made to be flat. Then, the sacrifice layer 301 is removed and a space 205 where an actuator can move by electrostatic force is generated. Thus, the step is precisely transferred and the precise step 309 of sub-micron can easily be formed.
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