| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device of high resolving power, high accuracy, and high speed by including two lens components directing the concave faces to each other in a first lens group, and two lens components directing the concave faces to each other in a second lens group. SOLUTION: From the object side, first and second lens groups G1, G2 having positive refracting power are provided. The first lens group G1 is constituted of a lens component L11 (r2-r5) composed of two positive lenses, a negative meniscus lens component L12 (r6-r7) directing the concave face to the image side, a negative meniscus lens component L13 (r8-r9) directing the concave face to the object side, and a lens component L14 (r10-r13) of two positive lenses. The second lens group G2 is constituted of a lens component L21 (r14-r15) consisting of one positive lens, a negative meniscus lens component L22 (r16-r17) directing the concave face to the far side from the object, a weak power of meniscus lens component L23 (r18-r19) directing the concave face to the object side, and a lens component L24 (r20-r21) consisting of one positive lens.
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