| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize an angular velocity-detecting element and to improve its characteristics. SOLUTION: The angular velocity-detecting device consists of a three-forked vibrator that is composed of a piezoelectric single crystal body with two branches for drive that is subjected to self-excitation vibration in the direction inside a face (outside a face) at a resonance frequency f0 (Hz) and one branch for detection with four electrodes for detection that is forcibly vibrated in the face (outside the face) at a frequency of f0 Hz by coriolis force accompanied by rotation, an oscillation circuit for performing the self-excitation vibration of the branch for drive, an operational amplifier 38 where the second electrode for delection of the branch for detection, a third electrode for detection, and a resistor that is connected to a plus input terminal are connected to the ground wire at the same potential, a first electrode for detection, a fourth electrode for detection, and a minus input terminal are connected, and the minus input terminal and an output terminal are connected via a feedback resistor Rf, and a detection circuit 5 consisting of an integration circuit where the output terminal of the operational amplifier 38 is connected to the plus input terminal. |
