发明名称 MOVABLE TABLE APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To absorb variations of a roller dimension, or changes of the distance between guide rails due to temperature changes, by a method wherein an elastic body deformable in a pressurized direction to a first guide is provided between a second table mounting a first table movable in a straight line and the guide. SOLUTION: An elastic body 30 is fixed to an X table 2 with bolts, and a fixing side guide rail 4 is fixed to the elastic body 30 with bolts. The elastic body 30 gives a pressing force for closely contacting a fixing side guide rail 4 and a moving side guide rail 5 opposite to a roller 7 by a preloading screw 20. When preloaded by the elastic body 30, when a diameter of the roller 7 which the moving the side guide rail 5 newly pinches after a Y table 1 moves downwardly of a paper face is larger than that of the roller 7 which the moving side guide rail 5 has already pinched, a displacement of the guide rail is absorbed to keep the pressure constant. Furthermore, when the roller 7 is ejected from between the guide rails, the guide rail is pressed to the roller to make the pressure constant.</p>
申请公布号 JP2000269307(A) 申请公布日期 2000.09.29
申请号 JP19990069534 申请日期 1999.03.16
申请人 HITACHI LTD 发明人 MIZUOCHI MAKI;FUKUSHIMA YOSHIMASA;KATSUYAMA MASAMI;KURIMOTO KOZO
分类号 B23Q1/00;B23Q1/26;B23Q1/40;B23Q1/56;B23Q1/62;G12B5/00;H01L21/68;(IPC1-7):H01L21/68 主分类号 B23Q1/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利