| 摘要 |
PROBLEM TO BE SOLVED: To eliminate degradation of stability in a beam direction caused by an unstable resonator by dividing gas discharge into a plurality of bands, by providing a recess to opposite surfaces of a pair of electrodes an providing an optical path of a laser resonator along the divided band-like discharges. SOLUTION: An electrode 1 and an electrode 2 are held by defining an electrode interval by an insulator 9, a space between the electrode 1 and the electrode 2 is filled with laser gas of proper composition and pressure, each of the electrodes 1, 2 makes cooling liquid circulate through a cooling liquid hole 10 for enough cooling, and heat of gas generated by discharge is effectively emitted. Three recess 8 are formed in each of the electrodes 1, 2, discharge 7 is divided into four as four band-like discharges 7, and the cooling liquid hole 10 as an optical path is formed along the band-like discharges 7. An optical path which is the cooling liquid hole 10 moves a position parallel in an opposite direction by a mirror 3 for reflection. |
