| 摘要 |
PROBLEM TO BE SOLVED: To obtain a semiconductor simulating device which accurately simulates and outputs voltage- and current values which change depending upon internal resistance in the same manner as an actual semiconductor device for being inspected. SOLUTION: A logical value holding part 151 stores a parameter showing the state of a signal pin of a virtual device 150. A voltage source 152 and a pure resistance 153 store an internal voltage value and a resistance value at the time of a high level, and a voltage source 154 and a pure resistance 155 store an internal voltage value and a resistance value at the time of a low level. An input pure resistance 156 stores a resistance value at the time of high impedance. A switching part 157 applies a test signal applied to the signal pin from a DC parametric test executing part 148 to any of the source 152, the resistance 153, the source 154 and the resistances 155 and 156. A virtual device 150 simulates and outputs a voltage value and a current value on the basis of an inputted parameter and the test signal. |
