| 摘要 |
PROBLEM TO BE SOLVED: To detect precisely a surface potential, even if the surface potential is a high potential. SOLUTION: In this measuring method of a potential on a sample surface by using a potential detecting probe, a probe P vibrating in parallel with the sample surface is used as the potential detecting probe. And a surface potential of the sample S is measured by the operation of an electrostatic force working between charges on the probe P and on the sample S, by utilizing the change of the vibrating state of the probe P. This device is equipped with such a potential detecting probe P that the probe P head facing to the sample S surface is supported vibratingly in parallel with the sample S surface, a vibration exciting device A for vibrating forcedly the probe P, and a vibration state detecting means (PD, K) for detecting the change of the vibrating state of the probe P, and the surface potential of the sample S is measured by utilizing the variation of the vibrating state.
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