| 摘要 |
PROBLEM TO BE SOLVED: To prevent a ceramic green sheet from being damaged by providing a sculptured surface at an edge being located at the side of the vacuum chuck surface of a suction port that a suction head has. SOLUTION: In the handling device, a sculptured surface 12 is provided at an edge 11 being located at the side of a vacuum chuck surface 8 of a suction port 9, and a radius of curvature 13 of the sculptured surface 12 is set to 100μm or less. Then, a mother ceramic green sheet (mother sheet) 3 containing a binder with a thickness of 5μm and 7 wt.% is prepared, and a vacuum chuck head 7 with a total of 5,000 chuck ports 9 and 10 with a diameter of 350μm is used. A green sheet (sheet) 6 is cut from the mother sheet 3 being backed by a carrier film (film) 2, at the same time a negative pressure is applied to the suction ports 9 and 10 and at the same time the sheet 6 is chucked by the vacuum chuck head 7, and the vacuum chuck head 7 is isolated from a cut table 4 for releasing the sheet 6 from the film 2, thus reducing the fracture occurrence rate of the sheet 6 at this time to 0/500.
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