发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a method for manufacturing it wherein a layout area of a semiconductor element which requires a high resistance is reduced. SOLUTION: An inter-layer insulating film 18 is coated over the entire surface of the upper layer of a salicide semiconductor element and non-salicide one, a contact hole 20 is opened at the position of the inter-layer insulating film 18 corresponding to the formation position of salicide semiconductor element and non-salicide one, and after a barrier metal 22 is coated on the internal surface of the inter-layer insulating film 18 and the contact hole 20, the barrier metal 22 which is coated on the internal surface of the contact hole 20 opened corresponding to the formation position of the non-salicide semiconductor element is removed.
申请公布号 JP2000269338(A) 申请公布日期 2000.09.29
申请号 JP19990076115 申请日期 1999.03.19
申请人 KAWASAKI STEEL CORP 发明人 FUJIMORI YASUHIRO
分类号 H01L21/3205;H01L21/28;H01L21/768;H01L21/822;H01L23/52;H01L27/04;(IPC1-7):H01L21/768;H01L21/320 主分类号 H01L21/3205
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