| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction hot plate capable of holding by suction a work used in the production equipment of a film liquid crystal for example, with high surface accuracy, no hole trace caused by suction on the surface even in a thin soft work, and uniform temperature across the whole surface of the work. SOLUTION: The suction hot plate is constituted by joining contact surfaces of a heating plate 1 inside which a heating element and a monitor sensor 12 are inserted; and a suction plate 2 made of a metal porous body, mounting a suction piping 21 on the side surface and a control sensor 22 on the inside. As the metal porous body, Cr-Mo steel having fine pores having a pore size of 50μm or less is used.
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