| 摘要 |
PROBLEM TO BE SOLVED: To clean the inside of a pannel stably with a simple process, restrain degrading of characteristics and improve the service life by connecting a top of a partitioning wall formed on a surface of a second pannel substrate to a first pannel substrate arranged oppositely thereto, and including one or more times of step for perform gas extraction while the pannel is put on after charging gas. SOLUTION: A second pannel substrate 2 having at its surface partitioning walls 3 formed at its top with conection members 5, respectively, is arranged in a face-to-face relation with a first pannel substrate 1, and an outer peripheral edge is sealed with a sealing member 4, thereby forming a vessel 10. This pannel is put ON while washing gas containing neon and xenon from a first bomb 8 and preferably gas activation oxygen is charged and made to flow therein after exhaust and heat operation is performed by means of a pump 7 through an exhaust pipe 6. Impurities are put out from a surface of each constituent part by heat generated by electric discharge and collision between ions. As it is or after the pannel is once put OFF, exhaust is performed, then the electric discharge gas of neon and xenon are charged from a second bomb 9, and thereafter the exhaust pipe 6 is sealed.
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