MOUNTING DEVICE FOR FIXING SEMICONDUCTOR WATER HAVING LINEAR EDGE

摘要

PROBLEM TO BE SOLVED: To provide a mounting device of a structure, wherein a semiconductor wafer having one linear edge is not only made horizontally fixed but also prevented from being damaged on the corners of the wafer. SOLUTION: This device is a mounting device for fixing a semiconductor wafer, which consists of a round base to be mounted with the wafer and a round clamp consisting of a round aperture 28 having a plurality of teeth provided at equal intervals, on the peripheral side of the aperture 28 for fixing the wafer on the base by applying a pressure under the lower part of the water, when the wafer is mounted on the base and has one linear edge.