| 摘要 |
PROBLEM TO BE SOLVED: To realize a probe card capable of reducing an. overdrive quantity capable of securing a needle pressure necessary for measurement or inspection of an electric characteristic by a probe needle, preventing side slip of the probe needle on an electrode of a test object, preventing damage or breaking of the electrode of the test object, and coping with miniaturization of the test object. SOLUTION: An opening 22 for marking where the head part of a marking device can be inserted is formed on a region other than an opening 21 for inspection where a probe needle 4 is projected, therefore, if a test object is miniaturized, the opening 21 for inspection is reduced to thereby shorten the length from the end fixed on a fixing part 5 of the probe needle 4 to a bent part. Hereby, an overdrive quantity capable of securing a needle pressure necessary for inspection of an electric characteristic by the probe needle 4 can be reduced. The overdrive quantity can also be reduced by shortening the length of a tapered part on the head part of the probe needle 4.
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