| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to automatically put wafers into a wafer cassette or take them out. SOLUTION: A wafer cassette is constituted of an annular wafer outer periphery contact member 8; cassette cases 2 to 11 which are provided with the member 8 on their upper surfaces, are formed with a wafer insertion hole 5 in each of the side surfaces on one side of the side surfaces vertical to their upper surfaces, are formed with each operating member insertion hole 6 in their lower surfaces and have each space capable of housing one wafer in their interiors; a wafer stage 17 formed with wafer support surfaces 19a which are supported in a vertically movable manner in the interiors of the cases 2 to 11, and support the lower surfaces of the wafers inserted from the holes 5 into the cases 2 to 11, and carrying member housing spaces 19b which can make a wafer carrying member H for supporting the lower surface of each wafer pass through, stage guide members 11 for guiding the vertically movable wafer stage 17 in the vertical directions; and stage energizing springs 24 for making a force to always move upward the stage 17 act on the stage 17.</p> |
