| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a two-terminal type non-linear element especially excellent in uniformity of voltage-current characteristics such as steepness, symmetry, and uniformity, and to provide a manufacturing method of a liquid crystal panel of uniform display by using this two-terminal type non-linear element. SOLUTION: Heat treatments, which are largely influential on characteristics of a TFD among the manufacturing processes for element substrates 200 where the TFD is formed, are pre-annealing and annealing A. Therefore, the element substrates 200 are turned upside down in the annealing furnace 400 for performing annealing A heat treatment contrary to pre-annealing heat treatment. Thus, the bias of heat distribution in the annealing furnace 400 is offset, so that the characteristics of the TFD to be formed are unifomalized.</p> |
