发明名称 THIN-FILM TRANSISTOR, LIQUID CRYSTAL DISPLAY DEVICE USING THE THIN-FILM TRANSISTOR, AND MANUFACTURE OF THEM
摘要 <p>PROBLEM TO BE SOLVED: To provide a thin-film transistor at a low cost which can restrain diffusion of impurities from a glass substrate to a semiconductor layer, and improve transistor characteristics, in particular the threshold voltage characteristic, a manufacturing method of the thin-film transistor, a transmission type liquid crystal display device capable of improving transmittance, and a manufacturing method of the liquid crystal display device. SOLUTION: This polycrystalline silicon thin-film transistor is provided with an insulating undercoat thin-film layer 32, formed on a glass substrate 31 by using a silicon oxinitride film, a semiconductor layer 35 which is formed on the thin-film layer 32 and has an active region 39, a source region 38s and a drain region 38d which are formed of a polycrystalline silicon film, a gate insulating film 36 formed on the semicondudor layer 38, and a gate electrode 37 arranged on the gate insulating film 36.</p>
申请公布号 JP2000269506(A) 申请公布日期 2000.09.29
申请号 JP19990071609 申请日期 1999.03.17
申请人 TOSHIBA CORP 发明人 KAWAMURA SHINICHI
分类号 H01L29/786;G02F1/136;G02F1/1368;H01L21/336;(IPC1-7):H01L29/786 主分类号 H01L29/786
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