| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress rises in initial cost and running cost of a fluid heating device accompanying the improvement of the heating ability improvement of a facility and a heating means with respect to the abolition of the waste liquid of a high-temperature fluid. SOLUTION: In the enclosure 10 of an extremely pure water heating device, a heating section 20, a waste heat recovering section 30, a supply fan 40, and a power supply/control unit 50, are provided. In the section 30, a flow passage through which a waste liquid flowing in from a pipeline 66 can be made to flow to another pipeline 67 is provided. In the section 30, in addition, the heat energy of the waste liquid is absorbed to the extremely pure water flowing in an extremely pure water flowing-in pipe line 62 and such a heat-exchanging action takes place that the temperature of the extremely pure water flowing through the pipeline 62 rises to about an ordinary temperature (25 deg.C) and, on the other hand, the temperature of the waste liquid flowing through the flow passage in the waste heat recovering section 30 drops from the flowing-in temperature of 80 deg.C.</p> |
