发明名称 ELECTRO-OPTICAL DEVICE AND MANUFACTURE THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To provide an electro-optical device capable of increasing a numerical aperture of pixels, increasing storage capacitance at the same time and displaying the high quality image, and to provide an easier manufacturing method of such an electro-optical device. SOLUTION: This electro-optical device is provided with TFTs 30, data lines 6a, scanning lines 3a, capacitance lines 3b, and pixel electrodes 9a on a substrate. The pixel electrodes and the TFTs are connected by two contact holes via a 1st barrier layer 80a. Under the TFTs 30, a 1st conductive shielding film 11a is arranged. 1st storage capacitance 70a is formed of a part of a semiconductor layer and the capacitance lines, 2nd storage capacitance 70b is formed of the capacitance lines and a part of a 1st barrier layer, and 3rd storage capacitance 70c is formed of a part of the semiconductor layer and the 1st shielding film, respectively.</p>
申请公布号 JP2000267131(A) 申请公布日期 2000.09.29
申请号 JP19990067168 申请日期 1999.03.12
申请人 SEIKO EPSON CORP 发明人 MURAIDE MASAO
分类号 G09F9/30;G02F1/136;G02F1/1368;H01L21/336;H01L29/786;(IPC1-7):G02F1/136 主分类号 G09F9/30
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