发明名称 RAIL OF CARRIAGE FOR CLEAN ROOM
摘要 PROBLEM TO BE SOLVED: To assure an air path to a filter fan unit from a rail body, with no drilling on the rail body. SOLUTION: Dovetail grooves 10 and 10 are provided on both side parts of a rail body 2, where a bracket 20 is fitted with an interval, with the bracket 20 mounted with upper and lower covers 36 and 38. The gap between the brackets is taken as an air path from the rail 2 to a filter fan unit 40. Thus, the air path to a filter fan unit 40 is assured with no drilling on the rail 2.
申请公布号 JP2000269296(A) 申请公布日期 2000.09.29
申请号 JP19990068259 申请日期 1999.03.15
申请人 MURATA MACH LTD 发明人 IZUMI TAKANORI
分类号 B61B13/06;B61D27/00;B65G21/22;B65G49/00;F24F7/06;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B61B13/06
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