Verfahren zum doppelseitigen Beschichten eines Substrates mit insbesondere einem HTS-Material durch Materialabscheidung und Vorrichtung zur Durchführung des Verfahrens

摘要

The invention relates to a method for coating both sides of a substrate. According to the inventive method, an HTS material is used for material deposition. The coating material is deposited on the substrate (2) while the substrate (2) is simultaneously heated by means of a heating device (3). The method is characterised in that the substrate (2) is attached to a moveable holder (1) and is periodically moved through the space between at least one pair of coating elements (4, 5) and is thereby coated. Said elements (4, 5) are situated opposite each other, face each other and are provided on both sides of the holder (1). The invention also relates to a device for coating both sides of a substrate (2) using especially an HTS material for material deposition. Said device comprises a holder (1). At least one substrate (2) can be fixed to said holder (1). The device also comprises a heating device (3) for heating the substrate (2) during coating and at least one coating element (4, 5) for depositing the coating material on the substrate.