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发明名称
Lithographisches Verfahren zur Herstellung einer Vorrichtung
摘要
申请公布号
DE68929206(T2)
申请公布日期
2000.09.28
申请号
DE19896029206T
申请日期
1989.02.17
申请人
AT & T CORP., NEW YORK
发明人
HOULIHAN, FRANCIS MICHAEL;REICHMANIS, ELSA;THOMPSON, LARRY FLACK
分类号
G03F7/004;G03F7/038;G03F7/039;H01L21/027;H01L21/30;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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