发明名称 |
CANTILEVERED MICROSTRUCTURE METHODS AND APPARATUS |
摘要 |
Cnantilevered microstructure apparatus and methods are described. An exemplary cantilevered microstructure apparatus includes a base, a cantilever, and a stop. The cantilever may be coupled to the base through a flexure, so that the cantilever is movable between a first angular orientation and a second angular orientation. The stop may be configured to contact the bottom portion of the cantilever in a contact area when the cantilever is in the second angular orientation. Alternatively, the stop may be configured to contact the cantilever in a contact area sized so that, upon application of an electrostatic bias between the cantilever and the stop, a sufficient force holds the cantilever against the stop. Alternatively, the stop may have a substantially planar surface configured to contact the cantilever in a contact area sized so that, upon application of a force to the cantilever substantially normal to the substantially planar surface of the stop, a sufficient force holds the cantilever against the stop such that the cantilever lies in a plane substantially parallel to the substantially planar surface of the stop. |
申请公布号 |
WO0057233(A2) |
申请公布日期 |
2000.09.28 |
申请号 |
WO2000US05744 |
申请日期 |
2000.03.02 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;BEHIN, BEHRANG;LAU, KAM, Y.;MULLER, RICHARD, S. |
发明人 |
BEHIN, BEHRANG;LAU, KAM, Y.;MULLER, RICHARD, S. |
分类号 |
B81B3/00;G02B6/35;G02B26/08 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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