Micromechanical optical motion device has movable plate with driven electrode/permanent magnetic volume loosely joined to base plate via arrangement for setting distance between them

摘要

The device consists of a plate (1) movable relative to a base plate (4) at a distance from the base plate and connected via a spring arrangement to a frame enclosing the plate and also movable by electrostatic or electrodynamic forces. The plate is loosely connected to the base plate via an arrangement for setting the distance between them. The surface of the plate facing the base plate has at least one driven electrode or a permanent magnetic volume and the frame and base plate are arranged at a fixed distance apart.