Integrated calorimetric spectrometer

摘要

A micro-instrument for detecting a chemical is formed on a coin-sized semiconductor substrate. A waveguide is formed by a semiconductor layer disposed on the substrate. The waveguide semiconductor layer has a groove forming an entrance aperture for receiving polychromatic radiation. An infrared emitter is disposed in the groove for generating the polychromatic radiation. An array of micro-mechanical thermal detectors can be formed integrally with the substrate. Each of the thermal dectectors has a measurable characteristic physical parameter and each of the thermal detectors has a coating exhibiting a preferential adsorption of at least one chemical to be sensed. A self focusing reflection grating is formed integrally with the waveguide semiconductor layer for directing a monochromatic spectrum onto the array responsive to the polychromatic radiation, such that each of the thermal detectors receives different wavelengths of the monochromatic spectrum.