PLASMA REACTOR WITH A DEPOSITION SHIELD,申请号EP19980960586-传众专利搜索

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发明名称	PLASMA REACTOR WITH A DEPOSITION SHIELD
摘要
申请公布号	EP1038046(A1)	申请公布日期	2000.09.27
申请号	EP19980960586	申请日期	1998.12.01
申请人	TEGAL CORPORATION	发明人	DEORNELLAS, STEPHEN, P.;DITIZIO, ROBERT, A.
分类号	H01L21/302;C23C14/56;C23C16/00;C23F1/02;H01J37/32;H01L21/00;H01L21/3065;H05H1/00;(IPC1-7):C23C16/00	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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