| 发明名称 |
Antireflective coating for improving cd control |
| 摘要 |
<p>An ARC that reduces the reflectivity in the resist is described. The ARC comprises first and sections. The first section operates in the absorption mode and the second section reduces the difference in the refractive indices between the resist and first ARC section, thereby improving CD control. <IMAGE></p> |
| 申请公布号 |
EP1039347(A1) |
申请公布日期 |
2000.09.27 |
| 申请号 |
EP20000104736 |
申请日期 |
2000.03.04 |
| 申请人 |
INFINEON TECHNOLOGIES NORTH AMERICA CORP. |
发明人 |
TOEBBEN, DIRK;LEE, YONG GILL;LU, ZHIJIAN |
| 分类号 |
G03F7/004;G03F7/09;G03F7/11;G03F7/26;H01L21/027;(IPC1-7):G03F7/09 |
主分类号 |
G03F7/004 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
