Photodetector with a multilayer filter and method of producing the same

摘要

Disclosed is a photodetector with a multilayer filter. A light-receiving substrate (2) is mounted on a recessed portion of a ceramic stem (1). An electrode pad (4) is formed on a P-type layer (2a) of the light-receiving substrate (2) while another electrode pad (5) is formed on an N-type layer (2b) of the light-receiving substrate. An optical multilayer filter (30) is formed on the light-receiving substrate (2) except the regions of the electrode pads. Further, an epoxy transparent resin is poured into the recessed portion of the stem (1) and then cured, so that a resin portion (3) to cover the light-receiving substrate (2) is formed. The optical multilayer filter is formed of amorphous low refractive index films made of SiO2 and amorphous high refractive index films made of TiO2. The amorphous high and low refractive index films are alternately stacked.