Vaporizing device for CVD apparatus

摘要

A vaporizing device for CVD source materials comprising: a vaporizer (8) for vaporizing introduced CVD source materials through heating, a spray nozzle (7) the end portion of which is fixedly attached to the vaporizer (8) for spraying the CVD source materials into the vaporizer (8), a cooling mechanism (19, 20) for cooling the spray nozzle (7), and heat conduction restricting means (21) attached either to a fixing portion (25), or provided proximate to a fixing portion of the spray nozzle (7) or the vaporizer (8). The effect can be achieved that generation of non-vaporized residues and particles can be decreased and that improvements in productivity owing to elongation of continuous operation time and decrease in film forming deficiencies can be achieved. <IMAGE>