Capacitance-type pressure sensor with reduced variation in reference capacitance

摘要

PCT No. PCT/JP97/00718 Sec. 371 Date May 15, 1998 Sec. 102(e) Date May 15, 1998 PCT Filed Jul. 3, 1997 PCT Pub. No. WO98/12528 PCT Pub. Date Mar. 26, 1998A capacitance-type pressure sensor capable of reducing a variation in reference capacitance. The capacitance-type pressure sensor includes insulating spacer (3b) arranged between a main capacitive electrode (4) and a reference capacitive electrode (5) to couple a base substrate (1) and a diaphragm substrate (2) to each other. The insulating spacer (3b) is patterned so as to restrain a variation in distance between the reference capacitive electrode (5) and a counter electrode (10) arranged on the diaphragm substrate (2). Such construction reduces a variation in capacitance between the reference capacitive electrode (5) and the diaphragm electrode (10), to thereby increase accuracy at which a pressure is measured.