SEMICONDUCTOR MICROVALVE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor microvalve capable of a high speed action. SOLUTION: A valve port 10a is provided on a silicon substrate 10. A valve element 23 closing/opening a valve port 10a at a center portion and a periphery portion 22c is provided with a flexible portion 22 having a flexibility bonded to one surface of the silicon substrate 10. In the flexible portion 22, a diffusion resistance layer 25 is formed at a predetermined position between the valve element 23 and the peripheral portion 22c. A wiring for energizing a diffusion resistance layer 25 is connected to the diffusion resistance layer 25. A movable piece 22a constitutes a first bimetal element and a second bimetal element 24 is laminated on the second bimetal element 24 through an insulation layer 26. A wiring 27b is connected to the second bimetal element 24. The second bimetal element 24 is constituted by a Peltier element. A bimetal is constituted by the first bimetal element comprising a movable piece 22a and the second bimetal element 24.