CONDENSED-TYPE SILICONE COMPOSITION, CURED PRODUCT, SURFACE MODIFICATION THEREOF, AND LITHOGRAPHY

摘要

PROBLEM TO BE SOLVED: To obtain the subject composition capable of forming cured products with hard surface portion and soft inside portion by including an organosilicon compound having a specific oxetane ring-contg. group and silicon-functional group and a condensation catalyst. SOLUTION: This composition is obtained by including (A) a condensable organosilicon compound with the average unit formula of formula I [R1 is an oxetane ring-free 1-10C univalent hydrocarbon; R2 is an oxetane ring-contg. group of formula II (R3 is H, a univalent hydrocarbon or a halogen; R4 is a 1-6C bivalent hydrocarbon; Z is O or S); X is a silicon-functional group; a+b is 1-2; 0<b<1; 0<c<3] having at least one R2 and >2 X groups on average in the molecule (pref. a condensable silane compound or polyorganosiloxane having oxetane ring), and (B) a condensation catalyst, and pref. furthermore, (C) an onium salt photoreaction initiator. By the way, this composition is capable of forming cured products through condensation reaction.