| 摘要 |
PROBLEM TO BE SOLVED: To obtain the subject precursor capable of affording resins excellent in electrical properties, thermal properties and low water absorption through its dehydrocyclization. SOLUTION: This polybenzoxazole precursor is such one as to be composed of a recurring unit of formula I ((n) is 1-1,000; R1 to R6 are each F or a fluoroalkyl; R7 and R8 are each H or a univalent organic group; (i) is 1-8; (j) is 0-7; i+j<=8; Y is a bivalent or higher valent organic group), being obtained by, for example, acid chloride method or condensation reaction between a bisaminophenol compound of formula II or a derivative thereof and a dicarboxylic acid of formula III in the presence of a dehydrocondensation agent such as polyphosphoric acid or dicyclohexyl dicarbodiimide. A polybenzoxazole resin excellent in electrical properties and thermal properties, or the like, is obtained by condensation reaction of the precursor obtained above under heating or treatment with a dehydrating agent. This resin is applicable e.g. in the form of an interlaminar electrical insulation film for semiconductors.
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