| 摘要 |
PROBLEM TO BE SOLVED: To speedily and efficiently machine comb teeth-shaped driving elements of a highly functional piezoelectric element of a minute size without deteriorating a quality. SOLUTION: A spacer 50 is interposed between a pair of piezoelectric element blocks 32A and 32B. An upper side of the piezoelectric element blocks 32A and 32B projects upward from the spacer 50. Slits 60A are formed from the upper side. Many piezoelectric driving elements 40A and 40B are thus formed via an equal distance into the shape of comb teeth. An upper part of the spacer 50 is arranged up to a position including base parts of the piezoelectric driving elements 40A and 40B. The upper part of the spacer 50 is a non-bond area not to be bonded to the piezoelectric element blocks 32A and 32B, reinforcing the base parts of the piezoelectric driving elements 40A and 40B and easing a stress at the time of forming the slits. The non-bonding area of the spacer 50 prevents restrictions on deformation of the piezoelectric driving elements 40A and 40B, so that a high responsivity and a sufficient shift amount can be obtained.
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