| 摘要 |
PROBLEM TO BE SOLVED: To enhance collecting effect of particles entrained with an exhaust gas flow and improve the handling performance of the exhaust gas by providing a particle handling means operated based on a flash or peak gas flow rate in an exhaust part of a dry type vacuum pump having pulsation gas flow characteristics. SOLUTION: A vacuum pump device comprises a plurality of pump stages composed of a pair of engaged rotors arranged in series so as to be gradually evacuated by the operation of the respective pump stages. In the output end of the vacuum pump, a particle handling means of a cyclone 11 form is connected to an exhaust pipe 12 from the last stage. This cyclone 11 is provided with a hollow cyclone body 31 having a cylindrical part 32 and a conical part 33, gas introduced from the exhaust pipe 12 enters into the cylindrical part 32 of the cyclone body 31 in the tangent direction via a cyclone entrance 34 so that a circulating flow is formed in the flow gas to separate the particles in the gas by the centrifugal force so that only the clean air is exhausted for the gas exit 35.
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