发明名称 SURFACE POLISHING DEVICE FOR WORKPIECE AND CARRIER UTILIZED IN THIS SURFACE POLISHING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a surface polishing device for a workpiece capable of accurately performing work simplified and capable of applying work to an end face of the workpiece without giving damage to the workpiece of hard quality and a carrier utilized in this surface polishing device for holding the workpiec. SOLUTION: This surface polishing device for a workpiece is provided with polishing means 26, 27 slid in a contact condition with an end face of the workpiece 8 and a carrier 29 holding the workpiece so as to make its end face abut on these polishing means, so as to perform polishing by supplying a polishing fluid between the polishing means and the workpiece. Polishing surfaces 26b, 27b of the polishing means are formed flat, and a polishing fluid guide means 61 guiding the polishing fluid along the polishing surface of the polishing means is provided in the carrier 29.
申请公布号 JP2000263426(A) 申请公布日期 2000.09.26
申请号 JP19990068503 申请日期 1999.03.15
申请人 SEIKO EPSON CORP 发明人 NOMIZO OSAMU;NEHASHI SABURO;MATSUZAKI NOBORU;YAMAGISHI TOSHIHIRO
分类号 B24B9/00;B24B37/27;B24B37/28 主分类号 B24B9/00
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