| 摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently machine with high precision by providing a laser oscillator, mask, an optical system with an image-forming lens, a worktable, a displacement gauge, a means for adjusting a focal distance of a beam on the basis of the measured data of the surface of a part to be machined and a means for driving the work table so that an irradiation head scans over the part to be machined. SOLUTION: A laser beam 67 from the irradiation head 18 with an unnecessary part cut by a mask 61 is divided into three beams through a tripartite prism 62. After being shaped by an aperture in a shape required for machining, the beams are reduction-projected by an image-forming lens 38 and irradiate an ITO thin film 51 on the upper face of a substrate 50 to form transparent electrodes 52. With the worktable moved by an X-axis and Y-axis driving parts, the laser beams 67 can scan the surface of the substrate 50. On the basis of the three-dimensional data premeasured by a displacement gauge on the surface to be machined, a focal distance is adjusted by moving a mask 36 in the direction of the optical axis of the laser beam.</p> |
