WAFER CONVEYER, WAFER POLISHER AND MANUFACTURE OF WAFER

摘要

PROBLEM TO BE SOLVED: To provide a wafer conveyer and a wafer polisher, which can mount/ demount a wafer accurately stably in a wafer hold head also efficiently polish the wafer, and a method of manufacturing the wafer. SOLUTION: This device total unit 1 is provided with a tray part 2 horizontally moved along a guide rail 6 and a wafer mounting/ demounting mechanism 4 set up under a moving direction of this tray part 2. Polishing pads S are arranged in a position in parallel to the guide rail 6. A wafer loaded in the tray part 2 relating to a wafer hold head 50 is mounted by turning a head drive part 51, opposing the wafer mounting/demounting mechanism 4 and the wafer hold head 50, also moving the tray part 2 under the wafer hold head 50, and lifting the wafer by the wafer mounting/demounting mechanism 4.