APPARATUS FOR MONITORING AND MEASURING NON-INVASION TYPE ON-THE-FLY TEMPERATURE

摘要

PURPOSE: An apparatus for monitoring and measuring a non-invasion type on-the-fly temperature is provided to measure a temperature of a moving radiator. CONSTITUTION: An apparatus for monitoring and measuring a non-invasion type on-the-fly temperature includes a first vacuum chamber(14) including an opening for conveying an object, a detection element(28) positioned adjacently to the opening outside the vacuum chamber for receiving heat radiation dissipated from the object, and a signal processor(38) connected to the probe, wherein the detection element is a pyrometer to limit an optical path(32) shutting off the radiator introduced into or discharged from a processing chamber. Electromagnetic waves are collected by the pyrometer and transmits the waves to the signal processor for detecting the electromagnetic waves to convert to a temperature reading signal. Accumulated data is utilized for generating a cooling curve representing the thermal influence on the radiator.