发明名称 |
LATTICE ASSEMBLY HAVING BIDIRECTIONAL BANDWIDTH CONTROLS |
摘要 |
PURPOSE: A lattice assembly having bidirectional bandwidth controls is provided to control a bandwidth by controlling a lattice surface to become more concave or less convex by a control rod. CONSTITUTION: A lattice(1) forms first and second end portions with a straight surface. A first end portion plate(30) is attached to the first end portion and stretched in a direction apart away from the straight surface. A second end portion plate(32) is attached to the second end portion, stretched in a direction apart away from the straight surface, and has a screwed channel. A spring housing(8) is connected to the first end portion plate(30) and forms first and second pressure surfaces. A control rod(4) has a screwed portion to be stretched into the spring housing(8).
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申请公布号 |
KR20000057994(A) |
申请公布日期 |
2000.09.25 |
申请号 |
KR20000006152 |
申请日期 |
2000.02.10 |
申请人 |
CYMER, INC. |
发明人 |
FOMENKOH GOR V.;IRI FREDERICK G.;IRSHOV ALEXANDER |
分类号 |
H01S3/08;G02B5/18;G03F7/20;H01S3/1055;H01S3/13;H01S3/137;H01S3/225;(IPC1-7):H01S3/08 |
主分类号 |
H01S3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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