发明名称 MAGNETICALLY LEVITATED SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a magnetically levitated system for detecting the temperature of an object of control and ensuring safety drive of the system without the need for special maintenance or requiring special structures or special manufacturing steps. SOLUTION: A magnetically levitated system includes a pair of mutually opposite electromagnets 11 and 13, a control object 15 provided between the electromagnets 11 and 13, and positional dislocation detecting sensors 12 and 14 for detecting the positional dislocation of the control object 15. Each detecting signal of the positional dislocation detecting sensors 12 and 14 is entered as input of a control circuit unit 20 to adjust the detecting signal in phase compensation and gain. Then, the magnetic attraction or magnetic repulsion of the pair of electromagnets 11 and 13 is controlled, using a control output of the control circuit unit 20 to control the levitation of the object 15 to be controlled in a noncontacted stationary state in an arbitrary position between the electromagnets 11 and 13. In addition, a temperature calculation circuit unit 30 is provided to detect the outer dimensions of the object 15, and the temperature of the control object 15 is detected on the basis of the detected signal from the positional dislocation detecting sensors 12 and 14.
申请公布号 JP2000262079(A) 申请公布日期 2000.09.22
申请号 JP19990064989 申请日期 1999.03.11
申请人 EBARA CORP;EBARA DENSAN LTD 发明人 OYAMA ATSUSHI;CHINO HIROYUKI;NAKAZAWA TOSHIHARU;SHIOKAWA ATSUSHI
分类号 G05D3/12;F16C32/04;F16C39/06;H02N15/00;(IPC1-7):H02N15/00 主分类号 G05D3/12
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