| 摘要 |
PROBLEM TO BE SOLVED: To reduce the consumption of power during standby time for each unit by stopping the supply of power by a unit power supply control part at standby time for each unit and supplying or stopping the supply of power to the unit according to the instruction of the unit power supply control part according to a unit power supply switching part. SOLUTION: An operation part 1 is composed of a recipe control part 11 for controlling treatment details to be made to a semiconductor wafer and a unit treatment control part 12 for controlling all units in a device based on information from the recipe control part 11. At the same time, the operation part 1 is composed of a unit power supply control part 13 for outputting an instruction signal for throwing and stopping the power supply of units 1, 2, 3, and 4 for processing in a device based on information from the unit treatment control part 12. The unit power supply control part 13 calculates the end time of the standby time of the unit from the initialization time of each unit, wafer load time, and wafer unload time and treatment time, and instructs the supply of power to a unit power supply switching part 5 at the end time.
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