| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for analyzing operations of a manufacturing apparatus accurately and instantly without deteriorating the production efficiency, leading to reduction of the analyzing cost, and a manufacturing apparatus for executing the method. SOLUTION: An operation history control unit 40, an operation history recipe storage unit 41, and an operation history result storage unit 43 are provided in a control unit 2 of a manufacturing apparatus (CVD apparatus 1). The operation history control unit 40 detects a change in operating state information about the start and end of the operation of a processing unit to be analyzed. The detected changes in the operating state information are in order stored in the operation history result storage unit 43 as operation history information. Selection of an object to be analyzed is performed in accordance with an operation history recipe stored in the operation recipe storage unit 41. Thus, the manufacturing apparatus can be analyzed based on the operation history information.
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