发明名称 |
TAPE CARRIER FOR SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To provide a tape carrier for semiconductor devices and manufacture thereof which is satisfactory in adhesion of a P-Ni plating layer to an Au plat ing 1 and superior in wire-bonding property. SOLUTION: This tape carrier comprises a conductor pattern layer 2 formed on the surface of a resin film 1, a P-Ni plating layer 3 formed on the conductor pattern layer 2, and an Au plating layer 4 formed on the plating layer 3. In this case, before the Au plating layer 4 is formed, it is immersed in a mixed soln. of ammonium fluoride and sodium sulfonate to reduce the P component in the surface layer of the P-Ni plating layer 3.
|
申请公布号 |
JP2000260829(A) |
申请公布日期 |
2000.09.22 |
申请号 |
JP19990061384 |
申请日期 |
1999.03.09 |
申请人 |
HITACHI CABLE LTD;UNIV WASEDA |
发明人 |
MIYAMOTO NOBUAKI;CHINDA SATOSHI;YOSHIOKA OSAMU;AISAKA TETSUYA;OKINAKA YUTAKA |
分类号 |
H01L21/60;C23C18/31;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|