| 摘要 |
PROBLEM TO BE SOLVED: To achieve stable still observation and to simplify operation by moving an inspection substrate retention means or an observation system support means in opposite directions each other and rotating a dust-absorbing fan in linking with the move. SOLUTION: A substrate 3 to be inspected is supplied onto a holder 2, is positioned and sucked and retained by a substrate presser member, macro lighting is turned on for starting inspecting a defect by macro observation, and the position coordinates of each defect part on the substrate 3 to be inspected are detected and stored. The position coordinates of the stored defective part is read, an observation unit support part 5 and an observation unit 6 are moved and controlled, and the observation axis of the objective lens of a micro observation unit 8 is matched to the position coordinates. The observation unit 6 is moved in the direction of X axis by the rotation of a ball screw 61, and also a dust suction fan unit 10 that is provided at one end part of the observation unit support part 5 is driven by the rotation of the ball screw 61. As a result, in the observation of the micro observation unit 8, a dust-collecting fan 10b can be stopped for stable observation.
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