| 摘要 |
PROBLEM TO BE SOLVED: To detect even a pattern equal to or less than one pixel size low in detection sensitivity with high accuracy. SOLUTION: When inspection data obtained by photographing an object to be inspected and reference data are compared with each other to inspect an edge pattern, in a differentiation circuit 25, the respective differential values with respective pixels adjacent to the noticeable pixels on inspection data in the same direction as the edge pattern direction on the reference data and the respective differential values of the pixels adjacent to the noticeable pixels with the pixels leaving one pixel on the side of the direction opposite to those pixels are calculated and these differential values are compared with a preset threshold value by a judge circuit 22 to inspect the edge pattern.
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