| 摘要 |
PROBLEM TO BE SOLVED: To provide a contamination trap device capable of enhancing contamination removing effect of a sample and safely conducting cleaning without taking out of the device. SOLUTION: A contamination trap 41 is heated in a non-contact state, and heating is controlled by the degree of vacuum and trap temperature at heating in a sample chamber. Since a heating means does not come in contact with a heating object, heat loss in cooling by heating mechanism is not generated, and cooling efficiency is enhanced. Since a cooling cycle is not added to the heating mechanism, reliability is enhanced.
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