| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to obtain the liquid discharge rate meeting the actually necessary circulating rate or replenishing rate for each of respective processing tanks by changing pumping capabilities with one kind of pumping devices. SOLUTION: The pumping devices 71 to 73 are the pumping devices of the processing tanks 2 of a development processing device for supplying a processing liquid to the processing tanks 2. The pumping devices 71 to 73 are driven by motors 71a to 73a and the liquid discharge rates of the pumping devices 71 to 73 are determined by the number of revolutions per specified time of the motors 71a to 73a. The number of revolutions per the specified time of the motors 71a to 73a is controlled in compliance with the required supply rates of the processing liquid to the processing tanks 2.
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