| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma apparatus improved in the evenness of plasma density by eliminating the unevenness of the plasma density due to E×B drift. SOLUTION: Magnets 1a to 1d are disposed near incoming windows of microwave guides 9 for generating plasma, The magnets 1a to 1d are disposed, so that vector product E×B of magnetic-flux density vectors B produced by the magnets 1 and electric-field vectors E produced in the plasma, are oriented in the direction toward an object to be processed or in the extraction direction of an ion beam. and plasma is carried in the direction towards the object to be processed or in the extraction direction of the ion beam. |
